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Laser Annealing Processes in Semiconductor Technology

Laser Annealing Processes in Semiconductor Technology

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ISBN: 9780128202555
Published: 2021
Publisher: Woodhead Publishing
Language: English
Format: Paperback / softback
Format: 9×6

Description

<i>Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics</i> synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

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